Novellus C2 Altus Spare Parts
Novellus C2 Altus Spare Parts List
| PART NAME | Part Number |
| ASSY,VENT PURGE | 02-834770-00 |
| IO CONTROLLER | 27-10157-00 |
| LOCD LOCK DOOR ACTUATOR LEFT ASSY | |
| LOCD LOCK DOOR ACTUATOR LEFT ASSY | |
| VAT VALVE ASSY | 02-115275-00 |
| VAT VALVE ASSY | 02-115274-00 |
| TYLAN GENERAL ADAPTORR MODEL AC2 | 27-053667-00 |
| PNEUMATIC SOLENOID ASSY | 02-828715-00 |
| ASSY,FLAT PNL DISPP PWR | 02-041243-00 |
| INDEXER END EFFECTOR | 15-055682-00 |
| INDEXER END EFFECTOR | 15-110374-01 |
| LEFT LOADLOCK INTFC PCB | 03-034719-00 |
| RIGHT LOADLOCK INTFC PCB DLCM-S | 03-034720-00 |
| BOARD,VALVE,RLL,DLCM/HILO | 60-10131-00 |
| BOARD,VALVE,LLL,DLCM/HILO | 60-10130-00 |
| KEYENCE ASSY | 02-834711-00 |
| TEACH PENDANT | |
| DLCM POWER CONTROL ASSY | C2-DLCM-S0790 |
| ADVANCE POWER SUPPLY | |
| POWER SUPPLY | |
| POWER SUPPLY | |
| POWER SUPPLY | |
| POWER SUPPLY | |
| VOLGEN ESK70U-1515 | ESK70U-1515 |
| FLAT SCREEN NATIONAL DISPLAY SYSTEMS DM-3S12/ZN | DM-3S12/ZN |
| CONTROLLER | 02-810123-00 |
| PNEUMATIC PANEL | 02-810546-00 |
| POWER & SIGNAL INTERFACE BOX | 03-10766-00 |
| SETRA DATUM 2000 | SETRA DATUM 2000 METER |
| CVD-W LPB/UPS | 02-810540-10 |
| VOLGEN EXU-156R6 | EXU-156R6 |
| VOLGEN EXU-246R3 | EXU-246R3 |
| VOLGAN SX100U-15S | SX100U-15S |
| CVD-W GAS BOX | 02-824316-01 |
| BROOKS 5866 RT SERIES PRESSURE CONTROLLER | 22-10502-00 |
| CARDWELL 154-30-1 | |
| PLATE MTG PED | 16-032558-00 |
| PLATE,MOUNTING,PED | 16-032609-00 |
| ASSY PIN LIFT 1 AND 2 | 02-00470 |
| NDEXER, WAFER,EXCLUSION OPTION,200MM | 15-00934-02 |
| MANIFOLD RING | |
| CVDW INTERLOCK ASSY PCB 03-810748-00 | 03-10748-00 |
| DLCM-LITE LOCAL POWER BOX B/O BOARD | 02-021383 |
| GAS BOX PCB | 03-10738-00 |
| COMP CONT,P100/16M | 02-834310-00 |
| CONTROLLER PM 250 | 233-4148-86 |
| I/O CONTROLLER | 27-810157-00 |
| TRANSPECTOR | TSP TH100 |
| MODEL 4421 RF POWER METER | 3509 / 4421 |
| DIAGNOSTIC HUB | 10087285 |
| VAT VALVE ASSY | 02-115275-00 |
| VAT VALVE ASSY | 02-115274-00 |
| PCB | 001-5526-01 |
| CVD-W INTERLOCK | 03-10748-00 |
| C2 HEATER PEDESTAL | 02-033134-00 |
| POWER SUPPLY | ESK70U-1515 |
| POWER SUPPLY | EXU-246R3 |
| MODULE CONTROLLER P100 | 02-034310-00 |
| ARMS | |
| HEAT EXCHANGER | 0221-10821 |
| MOER 2.25MM | 500027083 |
| POWER SUPPLY 12V | 233-2215-46 |
| AC POWER INPUT | 233-2219-92 |
| POWER SUPPLY & CIRCUIT BREAKER | |
| PM SERVO MOTORS | JGHT-4921-2 |
| POWER ONE POWER SUPPLY | PFC500-1024 |
| TRANSPECTOR | TSP TH100 |
| MOER RINGS 2.5 | |
| INDEXER TONGS | |
| PNEUMATIC BOARD | 02-810546-00 |
| POWER SUPPLY | EXU-246R3 |
| RIGHT LOADLOCK INTFC PCB | 03-834720-00 |
| CVD-W INTERLOCK | 03-10748-00 |
| I/O CONTROLLER | 27-810157-00 |
| INTF CVD-W & ETCH | 03-10355-00 |
| ASSY,LWR SPINDLE | 03-810534-02 |
| GSNX New Elevator Alignment Tool | |
| ASSY VACUUM UTILITIES WEVD | 02-810131-00 |
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