TEL Spare Parts List(2)
TEL Spare Parts List (2)
| PART NAME | Part Number |
| Tokyo Electron Motherboard | 4S70H021B |
| ELECTRICAL UNIT | 0100-76085 |
| ROBOT | VS2B |
| ELECTRICAL UNIT | YMW-2092 U01378 T/C |
| ELECTRICAL UNIT | YMW-2092 U01378 P/C2 |
| PCB | 1D810000 |
| PCB | E67920 |
| EBARA TURBO PUMP CONTROLLER | 305 |
| ENI - MW CONTROLLER | RFC-6-01 |
| VME RACK | 120831 |
| ELECTRICAL UNIT | YMW-2060 |
| EBARA TURBO PUMP CONTROLLER | ET600W |
| PCB | A310396564 |
| PCB | TYB412-1/C |
| PCB | TYB41C-1/GAS I/L |
| PCB | TYB419-1/PC |
| PCB | TYB41D-1/TMP |
| PCB | TYB421-1/INL |
| PCB | TYB222-1/SW |
| WAFER DISPENSER | NO NUMBER |
| AIR RAMS WAFER DISPENSER | CDBM2WL23-N1360 |
| ION GAUGE | NO NUMBER |
| SYSTEM REBOOT CONTROLLER | SRC II 006 |
| ELECTRICAL UNIT | BC93030 |
| ROBOT | TSM105-3A3/AB5 E72 |
| YME | 120860 |
| EBARA TURBO PUMP CONTROLLER | 305W |
| PCB | 1D08-000096-15 |
| PCB | 1C81-000114-11 |
| PCB | 1D08-000097-13 |
| PCB | 1D08-000113-12 |
| POWER SUPPLY UNIT | MMB75U-1 |
| MW CONTROLLER | RFC-6 |
| ROBOT | VS2B |
| TMP CONTROLLER | 305 W |
| TURBO MOLECULAR PUMP CONTROLLER | 600W ECT 04 |
| VME RACK | 120588 |
| CONTROL SCREEN W/ STYLUS | NO NUMBER |
| PUMP CONTROLLER | D37209000 |
| PUMP CONTROLLER | D37209100 |
| VALVE | 26332-KA11 |
| VALVE | 26332-KA71 |
| VALVE | 26324-KA11 |
| VAC VALVE | 12044-P A24 |
| MW CONTROLLER | RFC-6-01 |
| WAFER FEEDERS | NO NUMBER |
| ROBOT | VS2B |
| ROBOT WAFER ARM | SN2424F |
| ROBOT WAFER ARM | SN2235F |
| MW CONTROLLER | RFC-6-01 |
| COSEL POWER SUPPLY | MMB75U-1 |
| SMC CYLINDER | CDBM2WL23-N1360 |
| WAFER TURNTABLE | 14029T-11111 |
| WAFER TURNTABLE | 15016T-93812 |
| DIGITAL FLAT PANEL SCREEN | FP-VGA 260S |
| ROBOT | VS2B |
| ELECTRICAL UNIT | YMW-2064 |
| ELECTRICAL UNIT | YMW-2085 |
| ROBOT WAFER ARM | SN284(5)F |
| ROBOT | VOSH |
| CONTROLLER BOX | BC930310 |
| SYSTEM ROBOT CONTROLLER | DDMQF-SR2232I |
| SYSTEM ROBOT CONTROLLER | DDMQF-SR2231I |
| WAFER FEEDER | NO NUMBER |
| ELECTRICAL UNIT | YMW 2092 |
| SYSTEM ROBOT CONTROLLER | DDMQF-SR2232I |
| SYSTEM ROBOT CONTROLLER | DDMQF-SR2231I |
| HP MODEL 712/60 | A2615A |
| HP BLOCK CONTROLLER | C3253A |
| SAMSUNG MONITORS | 172MP S |
| MICRO DEGASSER | G1379A |
| MULTIPLE WAVELENGTH DETECTOR | G1315B |
| TERMINAL SERVER UNIT | T1DKO-00288-003 |
| TERMINAL SERVER UNIT | T2DKO-10068-003 |
| HPLC AUTOSAMPLER | G1313A |
| COMPAQ HARD DRIVE | G1030AX |
| TURBO MOLECULAR PUMP CONTROLLER | ECT04 PWM-2010 |
| T/C TMP CONTROLLER | 305W |
| FLOW CONTROLLER | SV-P1203 |
| ION GAUGE | NO NUMBER |
| PCB | 1D81-000131 |
| PCB | 1D08-000113-12 |
| PCB | 1D08-000129-11 |
| PCB | 1D08-000128-11 |
| PCB | 1D08-000140-11 |
| PCB | 1D08-000065-11 |
| PCB | 1D08-000088-11 |
| PCB | 1D08-000120-15 |
| PCB | 1D08-000104-11 |
| PCB | 1D08-000089-11 |
| PCB | 84-W8884B01F |
| PCB | ID80-001690-13 |
| PCB | SVA603V-1 |
| PCB | 1D08-000118-11 |
| PCB | 1D08-000096-13 |
| PCB | 1D08-000098-12 |
| PCB | 1D08-000092-13 |
| PCB | 1D08-000133-11 |
| PCB | EC08-000016-11 |
| PCB | 1D08-000099-12 |
| SWC CYLINDER UNIT | CDBM2WL23-N1360 |
| ROBOT | 99-38150-03 |
| PCB | 1D81-000065-1 |
| MWD CONTROLLER | RFC-6-01 |
| TUBRO-MOECULAR PUMP CONTROLLER | 95006B3 |
| VME RACK | 120814 |
| TURBO-MOECULAR PUMP CONTROLLER | 95002-D3 |
| TUCH SCREEN | NO NUMBER |
| WAFER DISPENSER | S94004201 |
| PCB | 1D08-000089-11 |
| PCB | 1D08-000104-11 |
| PCB | 1D08-000118-11 |
| PCB | 1D08-000140-11 |
| PCB | E67920 |
| PCB | 1D08-000133-11 |
| PCB | EC08-000016-11 |
| PCB | 1D08-000088-11 |
| PCB | 1D08-001690-13 |
| PCB | VAT.84 844 A |
| PCB | UC4B8602Y2 |
| PCB | 1D08-000092-13 |
| PCB | 1D08-000099-12 |
| PCB | 1D08-000098-12 |
| PCB | 1D08-000096-13 |
| PCB | 1D08-000115-11 |
| PCB | 1D08-000130-11 |
| PCB | SVA603V-1 |
| PCB | 01-W3884B |
| ION GAUGE | NO NUMBER |
| DC HIGH VOLTAGE POWER SUPPLY | NO NUMBER |
| ION GAUGE CONTROLLER | 330 |
| FLOW CONTROLLER | HE 20 SCCM |
| FLOW CONTROLLER | Ar 50 SCCM |
| FLOW CONTROLLER | Ar 300 SCCM |
| FLOW CONTROLLER | N2 500 SCCM |
| FLOW CONTROLLER | SiH4 200 SCCM |
| FLOW CONTROLLER | SV-P1203 |
| ROBOT | VS2B |
| TOUCH-SCREEN MONITORS | NO NUMBER |
| VAC VALVE | 12044-P A24 |
| ROBOT | VOSH |
| PCB | 1D08-000097-13 |
| SHOWER HEAD | 15042AA-56712 |
| PLASMA CONTROL BOX | NO NUMBER |
| POWER DISTRIBUTION BOX | UNIT Y2-855DD |
| PTI ASSY | CT2987-418906-W2 |
| LoadPort | |
| PTI metal Enclosure (does not include PTI unit) | |
| CRA Y BELT PULLEY | 2980-195729-11 |
| FLTG JOINT JB25-6-100 | 024-005670-1 |
| FLTG JOINT JB25-6-100 | 024-005670-1 |
| PULLEY | 2980-193308-11 |
| SENSOR | 2980-193374-11 |
| FAN | 2980-193380-11 |
| SMC DRIVER | 2986-400940-12 |
| CABLE | 2986-400939-13 |
| PULLEY | 2902-400094-11 |
| PULLEY | 2902-400093-11 |
| SENSOR | 2980-190427-11 |
| CABLE | 2986-400866-13 |
| CABLE | 2986-400865-13 |
| CABLE | 2986-400868-13 |
| PULLEY | 2985-498341-12 |
| PULLEY | 2902-400002-11 |
| PULLEY | 2985-465630-12 |
| UNDER CUP (12INCH) | CT2910-100117-16 |
| SLIDE ACTUATOR MXS12-100 | CT2986-400843-W2 |
| STEPPING MOTOR 4839-9015KE | CT2986-400848-W1 |
| SLIDE ACTUATOR MXS16-50B | CT024-015374-1 |
| PCB | CT2981-600355-14 |
| UNDER CUP 12" LITHO | CT2910-100117-16 |
| POWER SUPPLY | CT2939-000009-12REFURB |
| HCH PLATE UNIT | CT2987-419291-W1 |
| POWER SUPPLY | CT2939-000009-12 |
| HCH COVER | CT2985-435234-W4 |
| HCH PINCITTE | CT2910-202413-12 |
| POWER SUPPLY UNIT | CT2939-000009-12 |
| SOLINOID | CT2986-402860-W1 |
| PLASTIC RING | 2910-100519-11 |
| PLASTIC RING | 2910-101202-11 |
| TABLE PLATE | 2980-194838-11 |
| GUIDE RODS | 2918-000015-11 |
| PCB | 2986-400886-W1 |
| PCB | 2986-400826-W1 |
| MOTOR 4839-9015KE | 2986-400880-2 |
| MOTOR 4839-9015KE | 2986-400848-W1 |
| MOTOR 4839-9015KE | 2986-400879-W1 |
| VME RACK | KCR416-3107-AB |
| ACRO CHILLER | T-3055SS |
| TOOL MOVE KIT | 07-18-03852 |
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