Nikon Spare Parts List（1）
Nikon Spare Parts（1）
Tool Type：i14,EX14,S202
| PART NAME | Part Number |
| Vacuum Switches (PSA4-102VP) | 4S990-443AN |
| AIR SUPPLY/VACUUM BOX | 4K1970-306-1 |
| REX RL Full Assembly | 4B020-355AN |
| Y Fine Stage Amp (S202) / Reticle Stage (i14) | 4S061-666 |
| Maxon DC Motor | 4S602-208-1 |
| Load/Unload Slider Assembly | 4B019-966 |
| Accelerometer Controller | 4S585-505 |
| JK-5D16A Video Distributor | 4S990-734 |
| Humidity Transmitter | 4S288-077 |
| Sub Alignment Controller Power Unit | 4S069-762 |
| Interferometer Recievers | 4S259-024 |
| ALCP Sensor Box | 4S782-443 / 4S061-619 |
| Carrier Station LED's | 4B990-538 |
| FIA Lamp Power Supply | 4B990-840 |
| WT2 VACUUM MOTOR | 4B043-917 |
| Keyence Sensor (FS2-60) with Fibre Head (FU35-FA) | 4S258-054 / 4S258-100 |
| CT Rotation (complete asembly with motor and encoder) | 4B991-102 |
| Wafer Stage Flat Cables | 4S032-643AN |
| Wafer Stage X Mirror | |
| Wafer Stage Y Mirror | |
| Irradiance and Uniformity Sensor | 4L990-837 |
| TDK Noise Filter | ZRGT2210-M |
| WL3 Centre Detection LED and Sensor Unit | 4B990-540 (LED) 4B990-541 (Sensor) |
| Fultra 3 Phase Fan | |
| Aerotop Chamber Fan ( Model: DDOA31-18-41500 ) | |
| TDK Power Supply ( 48V 16Amp ) | RAX4B-15R |
| Mitsubishi Programmable Controller | FX-128MR |
| Nikon VCM Amp ( 48V 10A ) | 4S064-050 |
| Pneumatic Control Box For Air Mount (AVIS) | 4B024-508 |
| NA Variable Drive Assembly | 4B990-875 |
| AF Sensor Unit | 4B990-525 |
| Reticle Microscope Drive Assembly ( X1, Y ) | 4B990-963 |
| RL Robot Z drive motor UGQMEM-02MAKOE UTOPI-020SE | 4S602-132 |
| Water Manifold | |
| Yasakawa (CATC) Frequency Controller (Model: CIMR-XCAA20P4) | |
| Yasakawa (BATC) Frequency Controller (Model: CIMR-XCAA21PC) | |
| LLTC Tank | |
| Yamatake Honeywell Controller SDC40 | |
| Liquid Pressure Sensor PS8-102G | 4S288-119 |
| FIA Lamp Housing (Complete Assembly) | 4B023-836 |
| Toyozumi 500VA Transformer | CS680-017-1 |
| Cosel Power Supply ( 12V ~ 8.5A ) | PAA100F-12-N |
| Cosel Power Supply ( 5V ~ 10A ) | PAA50F-5-N |
| Cosel Power Supply ( 24V ~ 4.5A ) | PAA100F-24-N |
| TDK Power Supply ( 100-240V ~ 5.6 - 2.8A 50/60Hz ) | RAW24-16R |
| FC2 & AIS Turret With EX-FC2-SNS PCB | FC2 & AIS Turret ( 4B020-696 ) EX-FC2-SNS PCB Part No: 4S007-844 |
| Proximity Sesnsor Amplifier ( E2CA-AL4D-3 ) | |
| Pelchier Element ( 200V 0.5kw ) | |
| CKD Air Operated Valve | AMD31-15-12-F |
| Hoya-Schott AOFS Driver | SD-330 |
| TDK Power Supply ( 24V ~ 2.1A ) | FAW24-2R1 |
| Omron Solid State Relay ( 24-240VAC ~ 40A ) ( 5-24V DC ) | G3NA-240B |
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